【英文标准名称】:Semiconductordevices-Micro-electromechanicaldevices-Part4:GenericspecificationsforMEMS
【原文标准名称】:半导体装置.微电机装置.第4部分:MEMS用总规范
【标准号】:IEC62047-4-2008
【标准状态】:现行
【国别】:国际
【发布日期】:2008-08
【实施或试行日期】:
【发布单位】:国际电工委员会(IX-IEC)
【起草单位】:IEC/TC47
【标准类型】:()
【标准水平】:()
【中文主题词】:组件;机电的;材料;微电子学;微系统技术;性能;半导体器件;规范(验收);符号;系统工程;拉伸应变;抗拉测试;测试;测试条件;测试装置;薄膜;薄膜技术
【英文主题词】:Components;Electromechanical;Materials;Microelectronics;Microsystemtechniques;Properties;Semiconductordevices;Specification(approval);Symbols;Systemengineering;Tensilestrain;Tensiletesting;Testing;Testingconditions;Testingdevices;Thinfilms;Thin-filmtechnology
【摘要】:ThispartofIEC62047describesgenericspecificationsformicro-electromechanicalsystems(MEMS)madebysemiconductors,whicharethebasisforspecificationsgiveninotherpartsofthisseriesforvarioustypesofMEMSapplicationssuchassensors,RFMEMS,excludingopticalMEMS,bioMEMS,microTAS,andpowerMEMS.ThisstandardspecifiesgeneralproceduresforqualityassessmenttobeusedinIECQ-CECCsystemsandestablishesgeneralprinciplesfordescribingandtestingofelectrical,optical,mechanicalandenvironmentalcharacteristics.ThispartofIEC62047aidsinthepreparationofstandardsthatdefinedevicesandsystemsmadebymicromachiningtechnology,includingbutnotlimitedto,materialcharacterizationandhandling,assemblyandtesting,processcontrolandmeasuringmethods.MEMSdescribedinthisstandardarebasicallymadeofsemiconductormaterial.However,thestatementsmadeinthisstandardarealsoapplicabletoMEMSusingmaterialsotherthansemiconductor,forexample,polymers,glass,metalsandceramicmaterials.
【中国标准分类号】:L94
【国际标准分类号】:31_080_01;31_080_99;31_220_01
【页数】:42P.;A4
【正文语种】:英语